Structure and electrochromic property of vanadium pentoxide thin films prepared by magnetron DC sputtering at room temperature

Abstract

Vanadium pentoxide (V₂O₅) electrochromic thin films have been manufactured by magnetron DC sputtering method from Vanadium target (99.5% purity) in compound of O₂ and Ar gases. In especially, films have crystalline structure at low depositing temperature (room temperature), which has been defined by XRD, Raman spectrum and SEM figure. The optical property of films has been investigated by transmittance – absorption spectroscopy. Moreover, electrochemic and electrochromic properties of films have been examined. As the result, films have high transmittance (>70%), low crystalline structure, high insertion lithium ability and stability with many electrochemic cycles. With these high properties, V₂O₅ sputtering thinfilms have capability to be used in application.