Effects of humidity and temperature on quality factor of micro-beam resonators in atmospheric pressure and gas rarefaction

Authors

  • Nguyen Chi Cuong*, Trinh Xuan Thang, Lam Minh Thinh, Vuong Dinh Duy Phuc, Truong Huu Ly, Ngo Vo Ke Thanh, Le Quoc Cuong
  • Phan Minh Truong

Keywords:

Abstract

At atmospheric pressure (p=101325 Pa), the effects of humidity and temperature on moist air become important when discussing the quality factor of micro-cantilever and micro-bridge resonators. The squeeze film damping (SFD) problem, the dominant damping source for micro-beam resonators, is modelled using the modified molecular gas lubrication (MMGL) equation with finite element modelling (FEM) in the eigenvalue problem.

Downloads

Download data is not yet available.

Author Biographies

  • Nguyen Chi Cuong*, Trinh Xuan Thang, Lam Minh Thinh, Vuong Dinh Duy Phuc, Truong Huu Ly, Ngo Vo Ke Thanh, Le Quoc Cuong
    Research Laboratories of Saigon High-Tech Park, Lot I3, N2 Street, Saigon High-Tech Park, Tan Phu Ward, District 9, Ho Chi Minh City, Vietnam
  • Phan Minh Truong
    Institute for Computational Science and Technology, SBI Building, Quang Trung Software City, Tan Chanh Hiep Ward, District 12, Ho Chi Minh City, Vietnam

Published

2024-03-14

Issue

No. 1C (2024): MARCH 2024 . VOLUME 66 NUMBER 1

Section

PHYSICAL SCIENCES