OVERVIEW OF ORGANIC COMPOUNDS APPLIED IN SEMICONDUCTOR TECHNOLOGY

Tóm tắt

This paper attempts to give an overview of organic compounds used in semiconductor technology. Plasma processing technology is vitally important to several of the largest manufacturing industries in the world. Plasma-based surface processes are indispensable for manufacturing the very large-scale integrated circuits (ICs) used by the electronics industry. The electron transport coefficients in both pure gases and their mixtures are necessary data for the expansion of the choices of proper gases in plasma processing. The electron transport coefficients, which include electron drift velocities, density-normalized longitudinal diffusion coefficients and density-normalized effective ionization coefficients, were first calculated and analyzed using a two-term approximation of the Boltzmann equation in the E/N (ratio of the electric field E to the neutral number density)